Bronkhorst High-Tech

Equipment manufacturers require compact solutions to monitor or control gas flow and pressure in their systems. Due to micro solid state technology (MEMS), the footprint dimensions compared to conventional mass flow and presuure controllers can be halved. Bronkhorst High-Tech B.V. has over 25 years of experience in designing and manufacturing precise and reliable measurement and control devices for mass flow and pressure. With a wide range of instruments, the company offers innovative solkutions for many different applications in many different markets. These instruments can be made to a customers' specification, in whichever style is suitable, for laboratory, industrial or even hazardous environments within such markets as semiconductor industry and analytical instrumentation.

World's smallest mass flow and pressure controllers

Conventional mass flow and pressure meters and controllers have a footprint of 1.5", for example as specified within the NeSSI^TM system. Now, and in close co-operation with Lionix and the Netherlands Organisation for Applied Scientific Research TNO, Bronkhorst High-Tech has developed the IQ⁺FLOW mass flow sensor. Due to micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realising ultra compact flow controllers for flow rates from 1 to 2000 mln/min and presuure controllers for 0.3 to 100 psi. Thanks to these compact solutions the overall dimensions of the instrumentation can be downsized by 50%.

Flow sensor principles of operation

The actual flow sensor chip consists of a thin square membrane with two heaters and two temperature sensors (T-sensors) on its surface. The membrane is suspended by a frama around it and can withstand 200 psi (15 bar). The two heaters are raised in temperature to a T over the medium temperature by providing them with constant power. From each T-sensor, the hot side is located on the membrane, and the codl side is on the frame around the membrane. The temperature difference between the hot sides of the upstream and downstream T-sensors is proportional to, and a measure of, the flow. The combination of the patented, thermally balanced chip-sensor with the digital electronics ensures high eccuracy (0,8%RD + 0,2%FS), fast response (<0.5 sec) and a very stable zero.

Customer specific designs

A core philosophy within Bronkhorst is to form close working links and collaborations with its customers and more specifically with Original Equipment Manufacturers thereby ensuring optimised integration of our instruments. Most often, this results in bespoke designs for which various functions are combined into one microfluidic system. The IQ⁺FLOW range has so far offered, but is not limited to, the following functional modules: flow meter, pressure meter, control valve, shut-off valve, three way valve and mixing chamber. A combination of these modules can be mounted on a compact manifold, in line with a customers requirement, and following open design discussions. The "plug and play" assembly ensures space efficiency, cost reduction and minimization of potential leak points. Examples of atypical applications would include flow/pressure control in sample injection for Gas Chromatography systems and Nebulizer gas flow control in Mass Spectrometers.

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