MinacNed member event: Thin film/MEMS technology

The MinacNed team invites you to MinacNed member event on April 20,  where we will discuss: Thin film/ MEMS technology. MinacNed has invited 2 excellent speakers who will present their work, followed by a Q&A discussion.

Thin film/ MEMS

Online MinacNed member event
April 20, 2021
15:00-16:30 hrs
Registration free for MinacNed members


Rob van Schaijk, principal architecht Thin film/MEMS at Philips

Rob van Schaijk joined Philips Innovation Services in 2017, in the MEMS & Micro Devices department as principal architect. His main responsibility is MEMS process development in the Philips MEMS foundry with a focus on CMUT technology. With 20 years of experience in semiconductors, MEMS and IC technology in different positions, from senior scientist to R&D manager. Before joining Philips Innovation Services, he has been with Philips Research, Philips Semiconductors, NXP semiconductors and Imec on topics in the area of silicon processing, energy harvesting and sensors for use in wireless sensor nodes. He obtained a master degree in applied physics from the technical university of Eindhoven in 1995 and a PhD from the University of Amsterdam in 1999 in semiconductor physics.


c-MUT and p-MUT: new technology platform for medical ultrasound
Capacitive or piezoelectric micro-machined ultrasonic transducers (MUT) enable smaller form factors, larger arrays, larger bandwidths, and integration with driver circuitry for new medical ultrasound applications. The current technology based on piezo-electric crystals will be more and more unable to meet these requirements.  The new MUT technology is well suited and optimized for medical applications, ranging from general probes to integration in catheters. For general probes, it leverages main MUT advantages of high-volume manufacturing, low cost and high performance leading towards ubiquitous ultrasound. For the catheter-based devices, MUT technology also adds high levels of integration and miniaturization. In this presentation, an overview of CMUT and PMUT devices and market perspectives will be given. In addition, the state of the art and new developments of CMUT and PMUT technology and its use in several medical applications will be shown.


Richard Norte, Assistant Professor at Delft University of Technology & Co-Founder at Nenso Solutions

Richard NorteOur research focuses on creating new microchip technologies and designer meta-materials which can manipulate light & sound at the nanoscale. This allows us to create circuits which route photons & phonons in the same way conventional circuitry routes electrons. By sending laser light into nano-photonic circuits, we can interact with micro-sized mechanical oscillators, allowing us to measure vibrations on the femto-meter scale (10-15 m) – a size normally reserved to describe the radius of protons. We are expanding these unique capabilities to create quantum-limited sensors which can detect accelerations, temperatures, and forces on integrated microchips and can be readily translated into emerging nanotechnology industries. These light-based sensors are now laying the groundwork towards new types of microphones, accelerometers, and inertial navigation systems which can out-perform many conventional MEMS platforms in terms of sensitivity, energy consumption, and immunity to environmental noise and jamming. The aim is to create nano-mechanical sensors so sensitive and easy-to-use that we can study fundamental physics in new ways and push forward commercial applications.

Richard Norte holds a bachelors degree in Physics and Mathematics from Stanford University and a Ph.D. in Physics from California Institute of Technology. His work has been featured in Nature, Nature Photonics, Science, Physical Review Letters and on the cover of Optica and Scientific American. He is co-founder of consulting company, Nenso Solutions, which helps enable nanotechnology for next-generation industries. Our team is part of the DMN research group in the Precision and Microsystems Engineering (PME) department.

Aaike van Vugt, CEO VSParticle

Aaike van VugtAaike has an MSc in Chemical Engineering from TU Delft. “There is plenty of room at the bottom.” – a 1959 quote by famous physicist Richard Feynman in a talk titled ‘A staggeringly small world’ are the words that inspired our CEO, Aaike in his career pursuit. After graduation he went on to become a Co-Founder of VSPARTICLE. As CEO, he spends his time on both the R&D and the commercial sides of the business. He is passionate about nanotech’s potential to improve life on Earth and this passion it what fuels the leadership of VSPARTICLE. VSPARTICLE has unleashed the full power of nanotechnology and quantum properties by making the production of nanoparticles as easy as pushing a button. The future will build from the bottom up and there is a whole world of possibilities down there. We provide you with the right tools to explore new materials properties and accelerate your research. Simplicity is our super power, innovation can be yours.

Aaike will show the latest developments regarding the VSP-P1 nanoparticle printer. With this new tool it is possible to locally print new nanoparticle based materials onto MEMS devices. At the moment VSPARTICLE is collaborating with industry to develop next generation metal oxide gas sensors. Looking at the current development it is expected that the Nano Aerosol Process will become a standard SEMICON tool in 2-3 years.


Frank van de Scheur, Head of MEMS & Micro Devices at Philips & Chair of MinacNed board


The MinacNed member events are online via Zoom. You will receive a link after you complete the registration.

15:00 Opening MinacNed Thin Film/MEMS
15:05 Rob van Schaijk, Philips
15:30 Richard Norte, TU Delft
15:55 Aaike van Vugt, VSParticle
16:20 Room for discussion
16:30 Closing


Registration is free for all team members in MinacNed organisations.


apr 20 2021


15:00 - 16:30

Local Time

  • Timezone: America/New_York
  • Date: apr 20 2021
  • Time: 09:00 - 10:30
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